An introduction to microelectromechanical systems engineering /
Nadim Maluf, Kirt Williams.
- 2. baskı
- Boston : Artech House, 2004.
- XX, 283 s. : res., grf., tbl. ; 26 cm.
- Microelectromechanical Systems. .
Dizin: s. 273-282 Kaynakça vardır.
1580535909
satın
Applications and markets. Microelectromechanical systems. Electric engineering.